Combined Substrate Polishing and Biasing During Hot-Filament Chemical Vapor Deposition of Diamond on Copper

AuthID
 P-001-0QD
4
Author(s)
Rego, CA
·
Document Type
Article
Year published
2000
Published
in JOURNAL OF MATERIALS RESEARCH, ISSN: 0884-2914
Volume: 15, Issue: 3, Pages: 593-595 (3)
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Publication Identifiers
Wos: WOS:000085698400004
Source Identifiers
ISSN: 0884-2914
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