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Plasma Diagnostics of a Pecvd System Using Different Rf Electrode Configurations

AuthID
P-001-29P

Author(s)

Aguas, H

Martins, R

Fortunato, E

Document Type

Article

Year published

2000

Published

in VACUUM, ISSN: 0042-207X

Volume: 56, Issue: 1, Pages: 31-37 (7)

Conference

Symposium D - Measurement Techniques for Technological Plasmas at the 1999 E-Mrs Spring Meeting, Date: JUN 01-02, 1999, Location: STRASBOURG, FRANCE, Sponsors: Plasma & Ion Surface Engn Comm

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Publication Identifiers

DOI: 10.1016/s0042-207x(99)00157-8

Scopus: 2-s2.0-0033908301

Wos: WOS:000085217600006

Source Identifiers

ISSN: 0042-207X

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Plasma Diagnostics of a Pecvd System Using Different Rf Electrode Configurations

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