Structure and Properties of Sputtered Tial-M (M = Ag, Cr) Thin Films

AuthID
P-001-31P
Document Type
Article
Year published
1999
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 120, Pages: 297-302 (6)
Conference
26Th International Conference on Metallurgical Coating and Thin Films, Date: APR 12-15, 1999, Location: SAN DIEGO, CALIFORNIA, Sponsors: Div Amer Vacuum Soc, Vacuum Metallurgy & Thin Films
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-4243936139
Wos: WOS:000084051900046
Source Identifiers
ISSN: 0257-8972
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