Hardness Versus Structure in W-Si-N Sputtered Coatings

AuthID
 P-001-3J8
2
Author(s)
Document Type
Article
Year published
1999
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 116, Pages: 74-80 (7)
Conference
6Th International Conference on Plasma Surface Engineering (Pse 98), Date: SEP 14-18, 1998, Location: GARMISCH PARTENKI, GERMANY, Sponsors: European Joint Comm Plasma & Ion Surface Engn
Indexing
Wos®
Scopus®
Crossref®42
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-0033393422
Wos: WOS:000083914200011
Source Identifiers
ISSN: 0257-8972
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