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Micromachining of an Air-Bridge Structure Using Thin-Films on Glass Substrates
AuthID
P-001-4KF
4
Author(s)
Boucinha, M
·
Chu, V
·
Alpuim, JP
·
Conde, JP
Document Type
Article
Year published
1999
Published
in
SENSORS AND ACTUATORS A-PHYSICAL,
ISSN: 0924-4247
Volume: 74, Issue: 1-3, Pages: 5-8 (4)
Conference
Symposium H - Materials Aspects in Microsystem Technologies,
Date:
JUN 16-19, 1998,
Location:
STRASBOURG, FRANCE
Indexing
Wos
®
Scopus
®
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®
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®
Metadata
Sources
Publication Identifiers
DOI
:
10.1016/s0924-4247(98)00322-7
SCOPUS
: 2-s2.0-0032674783
Wos
: WOS:000079820200002
Source Identifiers
ISSN
: 0924-4247
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