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Microcrystalline Silicon Thin Films for Optical Applications
AuthID
P-001-6B5
5
Author(s)
Vieira, M
·
Morgado, E
·
Macarico, A
·
Koynov, S
·
Schwarz, R
Document Type
Article
Year published
1999
Published
in
VACUUM,
ISSN: 0042-207X
Volume: 52, Issue: 1-2, Pages: 67-71 (5)
Conference
2Nd European Conference on Hard Coatings (Etchc-2)/3Rd Iberian Vacuum Meeting (3Rd Riva),
Date:
SEP 22-24, 1997,
Location:
LISBON, PORTUGAL,
Sponsors:
Junta Nacl Investigacao Cient & Technol, Empresa Protuguese Aguas Livres, Spanish Vacuum Soc, Portuguese Vacuum Soc
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Publication Identifiers
DOI
:
10.1016/s0042-207x(98)00216-4
Scopus
: 2-s2.0-0032804888
Wos
: WOS:000077936500013
Source Identifiers
ISSN
: 0042-207X
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