Microcrystalline Silicon Thin Films for Optical Applications

AuthID
P-001-6B5
5
Author(s)
Document Type
Article
Year published
1999
Published
in VACUUM, ISSN: 0042-207X
Volume: 52, Issue: 1-2, Pages: 67-71 (5)
Conference
2Nd European Conference on Hard Coatings (Etchc-2)/3Rd Iberian Vacuum Meeting (3Rd Riva), Date: SEP 22-24, 1997, Location: LISBON, PORTUGAL, Sponsors: Junta Nacl Investigacao Cient & Technol, Empresa Protuguese Aguas Livres, Spanish Vacuum Soc, Portuguese Vacuum Soc
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Publication Identifiers
Scopus: 2-s2.0-0032804888
Wos: WOS:000077936500013
Source Identifiers
ISSN: 0042-207X
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