Nanocrystalline Silicon Carbon Doped Films Prepared by Hot Wire Technique

AuthID
P-001-6B9
3
Author(s)
Fernandes, B
·
Document Type
Article
Year published
1999
Published
in VACUUM, ISSN: 0042-207X
Volume: 52, Issue: 1-2, Pages: 147-152 (6)
Conference
2Nd European Conference on Hard Coatings (Etchc-2)/3Rd Iberian Vacuum Meeting (3Rd Riva), Date: SEP 22-24, 1997, Location: LISBON, PORTUGAL, Sponsors: Junta Nacl Investigacao Cient & Technol, Empresa Protuguese Aguas Livres, Spanish Vacuum Soc, Portuguese Vacuum Soc
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0032762762
Wos: WOS:000077936500025
Source Identifiers
ISSN: 0042-207X
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