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Structural Characterization of Mu C-Si : H Films Produced by Rf Magnetron Sputtering
AuthID
P-001-7DE
4
Author(s)
Cerqueira, MF
·
Ferreira, JA
·
Andritschky, M
·
Costa, MFM
Document Type
Article
Year published
1998
Published
in
MICROELECTRONIC ENGINEERING,
ISSN: 0167-9317
Volume: 43-4, Pages: 627-634 (8)
Conference
2Nd International Conference on Low Dimensional Structures and Devices,
Date:
MAY 19-21, 1997,
Location:
LISBON, PORTUGAL
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Publication Identifiers
DOI
:
10.1016/s0167-9317(98)00236-6
Handle
:
https://hdl.handle.net/1822/14191
SCOPUS
: 2-s2.0-0000576844
Wos
: WOS:000075867000087
Source Identifiers
ISSN
: 0167-9317
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