Properties of Indium Tin Oxide Films Prepared by Rf Reactive Magnetron Sputtering at Different Substrate Temperature

AuthID
 P-001-7QG
2
Author(s)
Document Type
Article
Year published
1998
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 322, Issue: 1-2, Pages: 56-62 (7)
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Publication Identifiers
SCOPUS: 2-s2.0-0032496535
Wos: WOS:000074745900011
Source Identifiers
ISSN: 0040-6090
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