Structural and Compositional Studies of A-Si,C : H Thin Films Obtained Excimer Lamp Chemical Vapor Deposition from Acetylene and Silane

AuthID
 P-001-8D3
6
Author(s)
Redondas, X
·
Gonzalez, P
·
Leon, B
·
Perez Amor, M
·
Document Type
Article
Year published
1998
Published
in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, ISSN: 0734-2101
Volume: 16, Issue: 2, Pages: 660-665 (6)
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Publication Identifiers
SCOPUS: 2-s2.0-0032386483
Wos: WOS:000072587200040
Source Identifiers
ISSN: 0734-2101
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