Alpha-Elastic Recoil Detection Analysis of the Energy Distribution of Oxygen Ions Implanted into Silicon with Plasma Immersion Ion Implantation

AuthID
 P-001-BEG
4
Author(s)
Mandl, S
·
Gunzel, R
Document Type
Article
Year published
1997
Published
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 81, Issue: 10, Pages: 6642-6650 (9)
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Publication Identifiers
SCOPUS: 2-s2.0-0001402621
Wos: WOS:A1997WZ57500012
Source Identifiers
ISSN: 0021-8979
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