Publications

Post-Deposition Annealing and Hydrogenation of Hot-Wire Amorphous and Microcrystalline Silicon Films

AuthID
P-001-C4S

Author(s)

Conde, JP

Brogueira, P

Chu, V

Editor(s)

Collins, RW; Fauchet, PM; Shimizu, I; Vial, JC; Shimada, T; Alivisatos, AP

Document Type

Proceedings Paper

Year published

1997

Published

in ADVANCES IN MICROCRYSTALLINE AND NANOCRYSTALLINE SEMICONDUCTORS - 1996 in Materials Research Society Symposium Proceedings, ISSN: 0272-9172

Volume: 452, Pages: 779-784 (6)

Conference

Symposium Q on Advances in Microcrystalline and Nanocrystalline Semiconductors - 1996, at the 1996 Mrs Fall Meeting, Date: DEC 02-06, 1996, Location: BOSTON, MA, Sponsors: Mat Res Soc, Asahi Glass Co Ltd, Hitachi Europe Ltd, Hitachi Ltd, Kaneka Corp, Mitsui Toatsu Chem Incorp, Sanyo Elect Co Ltd, Sharp Corp, Xerox PARC

Indexing