Amorphous Silicon-Carbon Alloys Deposited by Electron-Cyclotron Resonance Pecvd

AuthID
P-001-EZ6
2
Author(s)
5
Editor(s)
Hack, M; Schiff, EA; Wagner, S; Schropp, R; Matsuda, A
Document Type
Proceedings Paper
Year published
1996
Published
in AMORPHOUS SILICON TECHNOLOGY - 1996 in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172
Volume: 420, Pages: 381-386 (6)
Conference
14Th Symposium on Amorphous Silicon Technology, at the 1996 Mrs Spring Meeting, Date: APR 08-12, 1996, Location: SAN FRANCISCO, CA, Sponsors: Mat Res Soc
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0030407698
Wos: WOS:A1996BH07P00061
Source Identifiers
ISSN: 0272-9172
Export Publication Metadata
Marked List
Info
At this moment we don't have any links to full text documens.