Oxidation Behaviour of W-N-M (M = Ni, Ti) Sputtered Films

AuthID
 P-001-G9N
2
Author(s)
Document Type
Article
Year published
1995
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 74-75, Issue: 1-3, Pages: 998-1004 (7)
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Scopus®
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Publication Identifiers
Scopus: 2-s2.0-0029137677
Wos: WOS:000202964000060
Source Identifiers
ISSN: 0257-8972
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