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Study Of Tungsten Sputtered Films With Low Nitrogen-Content

AuthID
P-001-JJS

Author(s)

CASTANHO, J

CAVALEIRO, A

VIEIRA, MT

Document Type

Article

Year published

1994

Published

in VACUUM, ISSN: 0042-207X

Volume: 45, Issue: 10-11, Pages: 1051-1053 (3)

Conference

1St European Topical Conference on Hard Coatings (Etchc-1)/2Nd Iberian Vacuum Meeting (Ii Riva), Date: JUL 12-15, 1993, Location: ALICANTE, SPAIN

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Publication Identifiers

DOI: 10.1016/0042-207x(94)90020-5

Scopus: 2-s2.0-0028517397

Wos: WOS:A1994PH23600020

Source Identifiers

ISSN: 0042-207X

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Study Of Tungsten Sputtered Films With Low Nitrogen-Content

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