Cathodic Bombardment And Sputtering In The 0.5-4.0 Torr Pressure Region Of A Glow-Discharge Ion-Source

AuthID
 P-001-KF6
5
Author(s)
MASON, RS
·
MILTON, DMP
·
ANDERSON, PDJ
·
Document Type
Article
Year published
1994
Published
in RAPID COMMUNICATIONS IN MASS SPECTROMETRY, ISSN: 0951-4198
Volume: 8, Issue: 2, Pages: 187-194 (8)
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Publication Identifiers
Wos: WOS:A1994MX94100012
Source Identifiers
ISSN: 0951-4198
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