Structure And Morphology Of Titanium Nitride Films Deposited By Laser-Induced Chemical-Vapor-Deposition

AuthID
 P-001-KG0
4
Author(s)
JEANDIN, M
Document Type
Article
Year published
1994
Published
in JOURNAL OF MATERIALS SCIENCE, ISSN: 0022-2461
Volume: 29, Issue: 2, Pages: 404-411 (8)
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Publication Identifiers
SCOPUS: 2-s2.0-0028196286
Wos: WOS:A1994MU17400016
Source Identifiers
ISSN: 0022-2461
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