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Production And Characterization Of Si-N Films Obtained By Rf Magnetron Sputtering
AuthID
P-001-MJP
3
Author(s)
OLIVEIRA, A
·
CAVALEIRO, A
·
VIEIRA, MT
Document Type
Article
Year published
1993
Published
in
SURFACE & COATINGS TECHNOLOGY,
ISSN: 0257-8972
Volume: 60, Issue: 1-3, Pages: 463-467 (5)
Conference
3Rd International Conf On Plasma Surface Engineering,
Date:
OCT 26-29, 1992,
Location:
GARMISCH PARTENKIR, GERMANY
Indexing
Wos
®
Scopus
®
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®
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Publication Identifiers
DOI
:
10.1016/0257-8972(93)90133-9
SCOPUS
: 2-s2.0-0027912371
Wos
: WOS:A1993MD49900017
Source Identifiers
ISSN
: 0257-8972
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