Study of an Argon Magnetron Discharge Used for Molybdenum Sputtering. Ii: Spectroscopic Analysis and Comparison with the Model

AuthID
 P-001-MVD
3
Author(s)
Guimaraes, F
·
Bretagne, J
Document Type
Article
Year published
1993
Published
in PLASMA SOURCES SCIENCE & TECHNOLOGY, ISSN: 0963-0252
Volume: 2, Issue: 3, Pages: 138-144 (7)
Indexing
Wos®
Scopus®
Crossref®26
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-0001743898
Wos: WOS:000207477200002
Source Identifiers
ISSN: 0963-0252
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