Publications

The Effect Of Substrate-Temperature On The Properties Of Sputtered Titanium-Oxide Films

AuthID
P-001-N9H

Author(s)

MENG, LJ

ANDRITSCHKY, M

DOSSANTOS, MP

Document Type

Article

Year published

1993

Published

in APPLIED SURFACE SCIENCE, ISSN: 0169-4332

Volume: 65-6, Issue: C, Pages: 235-239 (5)

Conference

6Th International Conf On Solid Films And Surfaces, Date: JUN 29-JUL 03, 1992, Location: PARIS, FRANCE, Sponsors: FRENCH MINIST RES & SPACE, CHAMBRE COMMERCE & IND PARIS, UNIV PIERRE & MARIE CURIE, CEA, CNRS, CTR NATL ETUDES TELECOMMUN, MARNE VALLEE VILLE NOUVELLE, THOMSON CSF, ST GOBAIN, APPLE

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