The Effect Of Substrate-Temperature On The Properties Of Dc Reactive Magnetron Sputtered Titanium-Oxide Films

AuthID
 P-001-NCF
3
Author(s)
Document Type
Article
Year published
1993
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 223, Issue: 2, Pages: 242-247 (6)
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Publication Identifiers
SCOPUS: 2-s2.0-0027541413
Wos: WOS:A1993KN64500007
Source Identifiers
ISSN: 0040-6090
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