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Engineering Of Plasma Deposition Systems Used For Producing Large Area A-Si-H Devices
AuthID
P-001-Q9T
4
Author(s)
MARTINS, R
·
FERREIRA, I
·
CARVALHO, N
·
GUIMARAES, L
Document Type
Article
Year published
1991
Published
in
JOURNAL OF NON-CRYSTALLINE SOLIDS,
ISSN: 0022-3093
Volume: 137, Issue: PART 2, Pages: 757-760 (4)
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Scopus
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Publication Identifiers
DOI
:
10.1016/s0022-3093(05)80231-5
Scopus
: 2-s2.0-0040387195
Wos
: WOS:A1991GX22800030
Source Identifiers
ISSN
: 0022-3093
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