Application of the Photoacoustic Technique to the Determination of the Thickness of Multilayer Films Produced by Magnetron Sputtering

AuthID
 P-001-T18
5
Author(s)
FERREIRA, JA
·
ISABEL, M
·
FERREIRA, C
·
Document Type
Article
Year published
1989
Published
in VACUUM, ISSN: 0042-207X
Volume: 39, Issue: 7-8, Pages: 731-733 (3)
Indexing
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Scopus®
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Publication Identifiers
SCOPUS: 2-s2.0-0024921701
Wos: WOS:A1989AP86900026
Source Identifiers
ISSN: 0042-207X
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