The Influence of Oxygen Flow During Deposition on the Structural, Mechanical and Tribological Properties of Titanium Oxide Magnetron Sputtered Thin Films

AuthID
 P-002-3JT
4
Author(s)
Constantin, DG
·
Munteanu, D
·
Document Type
Article
Year published
2012
Published
in JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, ISSN: 1454-4164
Volume: 14, Issue: 11-12, Pages: 964-970 (7)
Indexing
Wos®
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-84872112563
Wos: WOS:000312614800016
Source Identifiers
ISSN: 1454-4164
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