Fem Numerical Analysis of Excimer Laser Induced Modification in Alternating Multi-Layers of Amorphous and Nano-Crystalline Silicon Films

AuthID
 P-002-5FE
5
Author(s)
Conde, JC
·
Martin, E
·
Stefanov, S
·
Document Type
Article
Year published
2012
Published
in APPLIED SURFACE SCIENCE, ISSN: 0169-4332
Volume: 258, Issue: 23, Pages: 9342-9346 (5)
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Publication Identifiers
SCOPUS: 2-s2.0-84864471730
Wos: WOS:000307241800049
Source Identifiers
ISSN: 0169-4332
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