Pressure Effects on the Dynamic Properties of Hydrogenated Amorphous Silicon Disk Resonators

AuthID
 P-002-7JN
3
Author(s)
Gualdino, A
·
·
Document Type
Article
Year published
2012
Published
in JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN: 0960-1317
Volume: 22, Issue: 8, Pages: 085026 (9)
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Publication Identifiers
SCOPUS: 2-s2.0-84866332697
Wos: WOS:000306649000026
Source Identifiers
ISSN: 0960-1317
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