Characterization of Nanostructured Hfo2 Films Using Rbs and Pac

AuthID
P-002-D1H
12
Author(s)
Carbonari, AW
·
Pereira, LFD
·
Rossetto, DA
·
Costa, MS
·
Document Type
Article
Year published
2012
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 273, Pages: 195-198 (4)
Conference
20Th International Conference on Ion Beam Analysis (Iba), Date: APR 10-15, 2011, Location: Itapema, BRAZIL, Host: Univ Fed Rio Grande Sul (UFRGS), Inst Phys, Ion Implantat Lab
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Publication Identifiers
Scopus: 2-s2.0-84860416300
Wos: WOS:000300471000053
Source Identifiers
ISSN: 0168-583X
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