in 2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) in Proceedings IEEE Micro Electro Mechanical Systems, ISSN: 1084-6999
Pages: 456-459 (4)
Conference
25Th Ieee International Conference on Micro Electro Mechanical Systems (Mems), Date: JAN 29-FEB 02, 2012, Location: Paris, FRANCE, Sponsors: IEEE, Robot & Automat Soc (RA), Reg Nord-Pas Calais