Oxidation of the Surface of a Thin Amorphous Silicon Film

AuthID
 P-002-JWX
4
Author(s)
Pedersen, K
·
Morgen, P
Document Type
Article
Year published
2011
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 520, Issue: 2, Pages: 697-699 (3)
Conference
18Th International Vacuum Congress (Ivc), Date: AUG 23-27, 2010, Location: Beijing, PEOPLES R CHINA, Sponsors: Int Union Vacuum Sci, Tech & Applicat (IUVSTA), Chinese Vacuum Soc (CVS)
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Publication Identifiers
SCOPUS: 2-s2.0-80755132243
Wos: WOS:000297988500007
Source Identifiers
ISSN: 0040-6090
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