Metallic Oxygen Barrier Diffusion Applied to High-Kappa Deposition

AuthID
P-002-XSB
5
Author(s)
Rauwei, E
·
Ducroquet, F
·
Matko, I
·
Document Type
Article
Year published
2011
Published
in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, ISSN: 1071-1023
Volume: 29, Issue: 1
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Publication Identifiers
Wos: WOS:000286679400047
Source Identifiers
ISSN: 1071-1023
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