Micro Cantilever Movement Detection with an Amorphous Silicon Array of Position Sensitive Detectors

AuthID
 P-003-3TT
8
Author(s)
Wierzbicki, R
·
Document Type
Article
Year published
2010
Published
in SENSORS, ISSN: 1424-8220
Volume: 10, Issue: 9, Pages: 8173-8184 (12)
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Publication Identifiers
Pubmed: 22163648
SCOPUS: 2-s2.0-77957990644
Wos: WOS:000282218800017
Source Identifiers
ISSN: 1424-8220
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