Mechanical Properties of Thin Silicon Films Deposited at Low Temperatures by Pecvd

AuthID
P-003-8T3
4
Author(s)
Paul, O
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Document Type
Article
Year published
2010
Published
in JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN: 0960-1317
Volume: 20, Issue: 3, Pages: 035022 (6)
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Publication Identifiers
Scopus: 2-s2.0-77749311363
Wos: WOS:000275331300022
Source Identifiers
ISSN: 0960-1317
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