Room-Temperature Cosputtered Hfo2-Al2O3 Multicomponent Gate Dielectrics

AuthID
P-003-PRH
Document Type
Article
Year published
2009
Published
in ELECTROCHEMICAL AND SOLID STATE LETTERS, ISSN: 1099-0062
Volume: 12, Issue: 10, Pages: G65-G68 (4)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-68949163562
Wos: WOS:000268962800011
Source Identifiers
ISSN: 1099-0062
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