Non-Aqueous Sol-Gel Routes Applied to Atomic Layer Deposition of Oxides

AuthID
 P-003-R16
4
Author(s)
Document Type
Article
Year published
2009
Published
in JOURNAL OF MATERIALS CHEMISTRY, ISSN: 0959-9428
Volume: 19, Issue: 4, Pages: 454-462 (9)
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Publication Identifiers
Scopus: 2-s2.0-58149520253
Wos: WOS:000262440400002
Source Identifiers
ISSN: 0959-9428
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