The Role of Modulated Ir Radiometry Measurements in the Characterization of Zr-O-N Thin Films

AuthID
 P-003-RPD
7
Author(s)
Carvalho, P
·
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Gibkes, J
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Bein, BK
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Pelzl, J
Document Type
Article
Year published
2009
Published
in PLASMA PROCESSES AND POLYMERS, ISSN: 1612-8850
Volume: 6, Issue: SUPPL. 1, Pages: S760-S766 (7)
Conference
11Th International Conference on Plasma Surface Engineering, Date: SEP 15-19, 2008, Location: Garmisch Partenkirchen, GERMANY, Sponsors: European Joint Comm Plasma & Ion Surface Engn
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Publication Identifiers
SCOPUS: 2-s2.0-77954939155
Wos: WOS:000272302900146
Source Identifiers
ISSN: 1612-8850
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