Simultaneous Formation of Silicon Carbide and Diamond on Si Substrates by Microwave Plasma Assisted Chemical Vapor Deposition

AuthID
P-003-WRE
Document Type
Article
Year published
2008
Published
in NEW CARBON MATERIALS, ISSN: 1007-8827
Volume: 23, Issue: 3, Pages: 250-258 (9)
Indexing
Publication Identifiers
Scopus: 2-s2.0-53649088628
Wos: WOS:000259774500011
Source Identifiers
ISSN: 1007-8827
Export Publication Metadata
Marked List
Info
At this moment we don't have any links to full text documens.