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High Precision Hf-180 Ion Implantation Using a High-Current Ion Implanter
AuthID
P-003-XHN
3
Author(s)
Redondo, LM
·
Rocha, J
·
Soares, JC
Document Type
Article
Year published
2008
Published
in
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,
ISSN: 0168-583X
Volume: 266, Issue: 16, Pages: 3661-3666 (6)
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Publication Identifiers
DOI
:
10.1016/j.nimb.2008.05.016
SCOPUS
: 2-s2.0-49449098151
Wos
: WOS:000259429100022
Source Identifiers
ISSN
: 0168-583X
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