Effect of the Oxygen Flow on the Properties of Ito Thin Films Deposited by Ion Beam Assisted Deposition (Ibad)

AuthID
P-003-YF8
4
Author(s)
Gao, JS
·
Song, SG
Document Type
Article
Year published
2008
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 516, Issue: 16, Pages: 5454-5459 (6)
Conference
3Rd International Conference on Advances of Thin Films and Coatings, Date: DEC 11-15, 2006, Location: Singapore, SINGAPORE
Indexing
Publication Identifiers
Scopus: 2-s2.0-43949138563
Wos: WOS:000257452200062
Source Identifiers
ISSN: 0040-6090
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