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Read-Out Calibration of a Soi Capacitive Transducer Using the Pull-In Voltage
AuthID
P-003-Z24
4
Author(s)
Mol, L
·
Rocha, LA
·
Cretu, E
·
Wolffenbuttel, RF
Document Type
Article
Year published
2008
Published
in
JOURNAL OF MICROMECHANICS AND MICROENGINEERING,
ISSN: 0960-1317
Volume: 18, Issue: 6, Pages: 064009 (6)
Conference
18Th European Workshop on Micromechanics (Mme 07),
Date:
SEP 16-18, 2007,
Location:
Guimaraes, PORTUGAL,
Host:
Univ Minho
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Publication Identifiers
DOI
:
10.1088/0960-1317/18/6/064009
SCOPUS
: 2-s2.0-57249090775
Wos
: WOS:000256619600010
Source Identifiers
ISSN
: 0960-1317
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