Performance of Thin Film Silicon Mems on Flexible Plastic Substrates

AuthID
 P-003-ZBC
3
Author(s)
Patil, SB
·
·
Document Type
Article
Year published
2008
Published
in SENSORS AND ACTUATORS A-PHYSICAL, ISSN: 0924-4247
Volume: 144, Issue: 1, Pages: 201-206 (6)
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Publication Identifiers
SCOPUS: 2-s2.0-42949086856
Wos: WOS:000255993200027
Source Identifiers
ISSN: 0924-4247
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