Spatial Structure of a Slot-Antenna Excited Microwave N-2-Ar Plasma Source

AuthID
 P-003-ZDD
4
Author(s)
Document Type
Article
Year published
2008
Published
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 103, Issue: 10, Pages: 103304 (12)
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Publication Identifiers
SCOPUS: 2-s2.0-44649174361
Wos: WOS:000256303800021
Source Identifiers
ISSN: 0021-8979
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