Depth Profiling of Defects in He Implanted Sio2

AuthID
P-003-ZFY
6
Author(s)
Mariazzi, S
·
Toniutti, L
·
Brusa, RS
·
Karbowski, A
·
Karwasz, GP
Document Type
Article
Year published
2008
Published
in ACTA PHYSICA POLONICA A, ISSN: 0587-4246
Volume: 113, Issue: 5, Pages: 1447-1453 (7)
Conference
37Th Polish Seminar on Positron Annihilation, Date: SEP 03-07, 2007, Location: Ladek Zdroj, POLAND, Sponsors: Univ Opole Rector, Univ Wroclaw Rector, Univ Wroclaw, Dean Fac Phys & Astron, Fdn Univ Wroclaw, Jan Pol Bis
Indexing
Publication Identifiers
Scopus: 2-s2.0-42949088577
Wos: WOS:000255347700024
Source Identifiers
ISSN: 0587-4246
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