Non-Aqueous Routes to Metal Oxide Thin Films by Atomic Layer Deposition

AuthID
 P-004-2GV
5
Author(s)
Rauwel, E
·
Rawel, P
·
Document Type
Article
Year published
2008
Published
in ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, ISSN: 1433-7851
Volume: 47, Issue: 19, Pages: 3592-3595 (4)
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Publication Identifiers
Pubmed: 18381608
SCOPUS: 2-s2.0-51049088249
Wos: WOS:000255530100023
Source Identifiers
ISSN: 1433-7851
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