The Effect of Bombarding Conditions on the Properties of Multifunctional Ti-C-O Thin Films Grown by Magnetron Sputtering

AuthID
 P-004-5S1
9
Author(s)
·
Le Bourhis, E
·
Riviere, JP
·
Document Type
Article
Year published
2007
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 202, Issue: 4-7, Pages: 946-951 (6)
Conference
34Th International Conference on Metallurgical Coatings and Thin Films, Date: APR 23-27, 2007, Location: San Diego, CA, Sponsors: Amer Vacuum Soc, Adv Surface Engn Div
Indexing
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Publication Identifiers
SCOPUS: 2-s2.0-36049013103
Wos: WOS:000251618900063
Source Identifiers
ISSN: 0257-8972
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