Capacitively Coupled Radio-Frequency Hydrogen Discharges: The Role of Kinetics

AuthID
 P-004-7H6
3
Author(s)
Document Type
Review
Year published
2007
Published
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 102, Issue: 6, Pages: 063305 (14)
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Publication Identifiers
Scopus: 2-s2.0-34848854793
Wos: WOS:000249787200016
Source Identifiers
ISSN: 0021-8979
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