Breakdown in Planar Magnetron Discharges of Argon on Copper

AuthID
 P-004-84X
5
Author(s)
Document Type
Article
Year published
2007
Published
in VACUUM, ISSN: 0042-207X
Volume: 81, Issue: 11-12, Pages: 1511-1514 (4)
Conference
6Th Iberian Vacuum Meeting/4Th European Topical Conference on Hard Coating, Date: JUN 26-28, 2006, Location: Salamanca, SPAIN, Sponsors: Spanish & Portuguese Vacuum Soc
Indexing
Wos®
Scopus®
Crossref®5
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-34547881491
Wos: WOS:000249849800024
Source Identifiers
ISSN: 0042-207X
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