Publications

Ion Implantation and Ion Beam Analysis of Mod Deposited Oxide Films

AuthID
P-004-8MA

Author(s)

Marko, X

Talagala, P

Sahana, MB

Naik, R

Padmanabhan, KR

Marques, CP

Alves, E

Document Type

Article

Year published

2007

Published

in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X

Volume: 261, Issue: 1-2, Pages: 456-460 (5)

Conference

19Th International Conference on Application of Accelerators in Research and Industry, Date: AUG 20-25, 2006, Location: Ft Worth, TX, Sponsors: Lawrence Berkeley Natl Lab, Lawrence Livemore Natl Lab, Los Alamos Natl Lab, Natl Canc Inst, Oak Ridge Associated Univ, Oak Ridge Natl Lab, Sandia Natl Lab, Univ N Texas, AccSys Technol Inc, Comecer SRL, Natl Electrostat Corp, Synergy Vacuum

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