Reactive Sputtering of Tioxny Coatings by the Reactive Gas Pulsing Process Part Ii: The Role of the Duty Cycle

AuthID
 P-004-9A7
8
Author(s)
Martin, N
·
Lintymer, J
·
Gavoille, J
·
Chappe, JM
·
Sthal, F
·
Takadoum, J
·
·
Document Type
Article
Year published
2007
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 201, Issue: 18, Pages: 7727-7732 (6)
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Publication Identifiers
SCOPUS: 2-s2.0-34249047460
Wos: WOS:000248604800017
Source Identifiers
ISSN: 0257-8972
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