Influence of Oxygen Addition on the Structural and Elastic Properties of Tic Thin Films

AuthID
 P-004-B29
4
Author(s)
·
Document Type
Article
Year published
2007
Published
in PLASMA PROCESSES AND POLYMERS, ISSN: 1612-8850
Volume: 4, Issue: SUPPL.1, Pages: S195-S199 (5)
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Publication Identifiers
Scopus: 2-s2.0-47349115125
Wos: WOS:000207735200039
Source Identifiers
ISSN: 1612-8850
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