Electrical Characterization of Capacitively Coupled Radio Frequency Discharges in Hydrogen

AuthID
 P-004-B2A
3
Author(s)
Document Type
Article
Year published
2007
Published
in PLASMA PROCESSES AND POLYMERS, ISSN: 1612-8850
Volume: 4, Issue: SUPPL.1, Pages: S937-S941 (5)
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Publication Identifiers
SCOPUS: 2-s2.0-34848886306
Wos: WOS:000207735200183
Source Identifiers
ISSN: 1612-8850
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